Evidence of segregation in (100) strained Si1-xGex alloys grown at low temperature by molecular beam epitaxy.
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E.T. Croke, T.C. McGill, R.J. Hauenstein, R.H. Miles
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Appl. Phys. Lett., 56, 367, 1990
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Describe different cleaning procedure, with Si flux oxide removal. Equation for calculating 550C critical thickness.
Grew films at low temperatures, 320C, and got excellent crystallinity. Films grown above hc gave multiplets that they explained as chemical segregation.